Dry Pumps, Kashiyama Model MU100GP, Ebara Model ESR20N, or equivalent

The National Institute of Standards and Technology (NIST) is seeking a contractor to provide two semiconductor-grade dry process pumps for use on flow systems, including an ALD reactor, as part of a CHIPS R&D Metrology program. The pumps must be compatible with organometallic and metal halide precursors and process gases. The contractor shall deliver a quantity of two pumps, Kashiyama MU100GP, Ebara ESR20N, or equivalent, inclusive of warranty and FOB Destination delivery terms. The pumps must meet specific technical specifications, including pump type, process type, ultimate pressure, minimum pumping speed, and chemical compatibility. Key points to consider: * The contractor shall submit a firm fixed price contract. * The contractor shall deliver the pumps within sixteen weeks after receipt of order. * The contractor shall provide a warranty for a period of at least one year after acceptance of the equipment. * The contractor shall be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee. * The Government reserves the right to perform performance tests and evaluations to verify specified system performance.