Notice of Intent to Noncompetitively Acquire Rapid Thermal Annealing (RTA) system

The National Institute of Standards and Technology (NIST) is seeking to acquire a Rapid Thermal Annealing (RTA) system for its Boulder Micro-Fabrication Facility (BMF). The system should be able to anneal substrates with a size of up to 150 mm and have a vacuum chamber. The system should also fit in a space of 1 m x 1 m x 2 m and have an optical pyrometer to directly measure the substrate temperature. NIST has determined that the RTA system from Annealsys is the only one that meets its minimum requirements. • The system should be able to anneal substrates with a size of up to 150 mm. • The system should have a vacuum chamber. • The system should fit in a space of 1 m x 1 m x 2 m. • The system should have an optical pyrometer to directly measure the substrate temperature.