Aerodynamic Aerosol Classifier (AAC) and Centrifugal Particle Mass Analyzer (CPMA)

The National Institute of Standards and Technology (NIST) is conducting market research to identify potential sources of commercial products/services that satisfy their anticipated needs for an Aerodynamic Aerosol Classifier (AAC) and Particle Mass Analyzer (PMA). The AAC should be capable of classifying aerosol particles by aerodynamic diameter from 25 nm to > 5 μm, while the PMA should be capable of classifying aerosol particles by mass to charge ratio at masses > 0.2 ag. The equipment should have remote control via Ethernet or USB, Windows-compatible software, and be compatible with TSI 3756 and 3775 condensation particle counters. • The AAC and PMA are required to establish a high-fidelity metrological framework for characterizing sub-50 nm impurities in semiconductor process chemicals. • The equipment should have a classification mechanism independent of particle charge. • The equipment should be compatible with 120 V, 60 Hz AC power. • The contractor should provide a written capability statement addressing their company capabilities, prior experience, and contract vehicles.