Rebid of Purchase of a Maskless Lithography System

The Louisiana Tech University Office of Purchasing is seeking sealed bids for the purchase of a Maskless Lithography System. The system must have a minimum feature size of less than 1 µm, a maximum sample size of at least 5” x 5”, and a write area of at least 100 mm x 100 mm. The system must also be able to pattern a 100 mm x 100 mm square in 16 hours at a specified sub-micron imaging size. The software must display the system status and have full data logging capability. The vendor must provide a minimum of a one-year warranty and have available parts and repair personnel within the United States. * Key features of the Maskless Lithography System include: * Minimum feature size of less than 1 µm * Maximum sample size of at least 5” x 5” * Write area of at least 100 mm x 100 mm * Ability to pattern a 100 mm x 100 mm square in 16 hours at a specified sub-micron imaging size * Software with system status display and full data logging capability * Minimum one-year warranty * Available parts and repair personnel within the United States