Sonic Nozzle Gas Mixing Systems

The National Institute of Standards and Technology (NIST) is seeking information from sources that may be capable of providing Sonic Nozzle Gas Mixing Systems. These systems should be able to perform precision dilution of raw gas materials to deliver high-accuracy amount-of-substance mixtures and standard reference materials. The systems will be used for ultrasensitive cavity ring-down and cavity-enhanced spectroscopy on gas-phase samples, standards, and reference materials. The project aims to detect trace impurities in gas-phase samples relevant to the semiconductor industry. Some key features required for the Sonic Nozzle Gas Mixing Systems include: • Minimum of one dilution gas inlet • Minimum of one source gas inlet • Minimum of one mixed gas outlet • All gas inlet and outlet fittings shall be 1/4-inch metal gasket face seal fittings • Number of source gas dilution points equal to 1024 • Relative uncertainty in dilution of <1 % • Relative stability in dilution precision of <0.5 % • Compatible with both air and nitrogen dilution gases • Gas outlet flow rate adjustable by bypass valve • Maximum gas outlet flow rate of 5 L min−1 • Targeted gas outlet flow rate of 0.1 L min−1 achievable with bypass valve • Gas outlet pressure up to 100 kPa • Power supply voltage compatible with 120 V standard US wall outlet • Physical size compatible with standard 19-inch instrument rack • USB communication with personal computer