Sources Sought Notice for High Vacuum motorized Stage

The National Institute of Standards and Technology (NIST) is seeking information from potential vendors for high-vacuum motorized stages for a new experimental apparatus. The apparatus will utilize short extreme-ultraviolet (EUV) light for non-destructive measurement of small features on computer chips. The required stages include a Calibration Set of three rotary stages and a Measurement Set of up to six stages for six axes of motion. The stages must be compatible with a high-vacuum system and have specific technical specifications, such as total range, speed, resolution, and load rating. • The stages will be used in a high-vacuum environment for a new experimental apparatus. • The Calibration Set includes three rotary stages with specific technical specifications. • The Measurement Set includes up to six stages for six axes of motion with specific technical specifications. • The stages must be compatible with a high-vacuum system and have vacuum-compatible cabling. • The vendor must provide mechanical drawings or 3D models of the stages. • The vendor must provide controllers for the stages with specific technical specifications.