NIST NB686090-26-01960 Nitrogen RF Plasma Source

The National Institute of Standards and Technology (NIST) is seeking a nitrogen RF plasma source for installation on their Veeco GEN 10 molecular beam epitaxy system. The source should include an RF autotuning unit and RF power supply. The system must meet specific technical specifications, including a 4.5” CF flange, water cooling on the RF feedthrough and coil, and all pyrolytic boron nitride (PBN) construction plasma chamber and aperture. The contractor shall deliver a quantity of one nitrogen RF plasma source, autotuning unit, and RF power supply, inclusive of FOB Destination delivery and warranty. • The system must be compatible with the Veeco GEN 10 molecular beam epitaxy system. • The source shall have a 4.5” CF flange and water cooling on the RF feedthrough and coil. • The system must include an RF autotuning unit and RF power supply. • The contractor shall provide a warranty for a period of at least one year after receipt of the equipment. • The system must meet specific technical specifications, including a proven growth rate of 0.2 µm/h to 2 µm/h for GaN in a similar MBE system.