Amended Sources Sought Notice for a Ultra-High Vacuum Sample Backout Chamber

The National Institute of Standards and Technology (NIST) is seeking information from industry sources for the provision of an ultra-high vacuum sample backout chamber. The primary deliverable of the CHIPS R&D project is a radiometer that will operate under industrial extreme ultraviolet lithography conditions, and this UHV chamber will allow NIST to ensure that its detectors can meet this criterion. The equipment is critical for achieving the project's mission of developing metrology equipment needed by the U.S.A. semiconductor industry. • The UHV chamber will be used for testing materials for UHV compatibility. • The primary deliverable of the CHIPS R&D project is a radiometer that will operate under industrial extreme ultraviolet lithography conditions. • The equipment is expected to be delivered in fiscal year 2025. • The anticipated period of performance is 16 weeks. • Interested parties should submit responses to the notice by the closing date, including company information, capabilities, and expertise.