BSA RFI-Tabletop Maskless Optical Writer

The Brookhaven Science Associates, LLC (BSA) is seeking information from companies that can provide a tabletop maskless optical writer system for the Center for Functional Nanomaterials. The system should be capable of operating in both raster and vector modes, with a minimum feature size of 600 nm or better, and should be able to expose areas up to 150 X 150 mm2. The system should also include a state-of-the-art computer with graphical user interface and software to enable system control, data conversion, and exposure. Some key features and requirements of the system include: * Stage system controllable through linear motors * Vacuum chucks for holding substrate sizes from 5 X 5 mm2 to 150 X 150 mm2 * Anti-vibration table for optical system and separate table for controller computer * Optical sources, including at least one 365 nm UV LED and one or more diode lasers * Intensity measurement unit for light power verification of optical sources * Overview camera with a field of view of at least 10 X 10 mm2 * Camera system for alignment to existing structures with alignment accuracy down to 500 nm * Capability to expose area up to 150 X 150 mm2 * Optical autofocus with dynamic range of 180 μm or better * Achievable minimum feature size of 600 nm or better * Raster mode with choice of different write speeds and minimum feature sizes * Vector mode with choice of different spot sizes and edge roughness * Gray scale exposures capability up to 256 levels