Combined Sources Sought Notice and Notice of Intent to Sole Source for a Silane Distribution System for the Boulder Microfabrication Facility

The National Institute of Standards and Technology (NIST) is seeking information from potential sources for a silane distribution system to replace the existing system at the Boulder Microfabrication Facility. The new system must be compatible with the existing life safety equipment, including the toxic gas monitoring system. The system should be able to deliver silane to eight tools, with a flow rate of 800 sccm total, and have the ability to isolate the system on both the input and output for safety and troubleshooting reasons. The system should also be able to interact with the toxic gas monitoring system to independently control and shutdown delivery lines tool by tool. • The system must be compatible with the existing life safety equipment, including the toxic gas monitoring system. • The system should be able to deliver silane to eight tools, with a flow rate of 800 sccm total. • The system should have the ability to isolate the system on both the input and output for safety and troubleshooting reasons. • The system should be able to interact with the toxic gas monitoring system to independently control and shutdown delivery lines tool by tool.