BSA RFI-PVD Tool

The Brookhaven Science Associates, LLC (BSA) is seeking information from companies that can provide a magnetron sputter deposition system for quantum device fabrication. The system must be a fully integrated UHV instrument with subsystems including the main deposition chamber, vacuum and pumping infrastructure, gas handling, magnetron sputtering sources with power supplies, substrate handling stage, load-lock, computer-based control, power distribution/pump control units, and essential accessories. The system must meet specific requirements, including a base vacuum of ≤ 2 × 10-9 Torr, a sputtering atmosphere control system, and a substrate stage capable of continuous heating to 1000 °C. Some key features of the system include: • A UHV stainless-steel sputtering chamber with a base vacuum ≤ 2 × 10-9 Torr • A fully integrated vacuum pumping system with dry mechanical, turbomolecular, and cryogenic pumps • A substrate stage capable of continuous heating to 1000 °C and RF/DC biasing • A sputtering atmosphere control system with at least three mass flow controlled gas lines • An integrated load-lock chamber with independent pumping for rapid wafer transfer • A computer control system with integrated software for full process monitoring, logging, and automation The vendor must provide onsite service covering system installation, commissioning, training, and warranty support.