CEE X-PRO II SPINNER-HOTPLATE WORKSTATION

The NASA/NSSC is seeking a CEE X-PRO II SPINNER-HOTPLATE WORKSTATION to support microfabrication for the Habitable Worlds Observatory and other projects. The workstation should be capable of processing wafers from 100mm to 200mm with precise resist thickness control and exceptional uniformity across the entire substrate. The required equipment features include programmable recipe storage, advanced automated controls, and built-in safety systems. The vendor shall deliver the workstation to NASA GSFC with all item selections, including safety kit, Apogee 200 spinner coater, bowl liners, dispense arm, and other components. • The workstation should have programmable recipe storage and advanced automated controls. • The workstation should have built-in safety systems to improve process reliability and repeatability. • The vendor shall deliver the workstation with all item selections, including safety kit, Apogee 200 spinner coater, bowl liners, and other components. • The deliverable schedule begins at the Date of Award, and the vendor shall ship all parts to NASA/GSFC within 16 weeks. • The period of performance for this statement of work is twelve to sixteen weeks from the date of award.