CHIPS R&D: Upgrade of In-Line RSoXS through station – Combined Sources Sought/Notice of Intent to Sole Source

The National Institute of Standards and Technology (NIST) is seeking information from sources that may be capable of providing a solution to upgrade the resonant soft X-ray scattering (RSoXS) through station at NSLS-II as part of a project in the CHIPS Metrology program. The upgrade will enable the through station to conduct soft X-ray reflectivity and resonant critical dimension small angle scattering. The requirements include a system with the sample and the detector on a 2-circle goniometer in the vacuum chamber, a high throughput sample exchange system, and all internal components such as pumping and gauges required to be on during operation shall be shrouded and protected. • The new RSoXS through station shall replace the current RSoXS station located at the SST1 beamline. • All installed components shall allow an unimpeded soft X-ray beam to pass through this section with negligible impact on downstream beam characteristics. • All components shall maintain a UHV environment of <5x10^-8 mBar when installed and in operation. • Stability and reproducibility of the placement of all components shall be less than 10 microns. • An egress path of minimum with 4ft (1220 mm) shall be maintained between the pedestal of Precision Slit C and the edge of the next downstream pedestal.