Preventative maintenance service for the deep etching system

The NASA/NSSC is seeking a contractor to provide preventative maintenance service for the deep etching system. The selected contractor will be required to provide a 12-month service contract, including comprehensive system troubleshooting, operational assistance, diagnostics, maintenance support, process verification, and technical evaluation of the system. The contractor will also be required to provide a 12-month preventive maintenance kit and one week of on-site field service support. The period of performance is one week on-site, scheduled by mutual agreement between the contractor and NASA GSFC. Key requirements include: • Provide a 12-month service contract for preventive maintenance and field service support for the STS DRIE HRM system • Provide a 12-month preventive maintenance kit including all required chamber and load lock o-rings, valve rebuild kits, viewport assemblies, and replacement bearings • Provide one week of on-site field service support • Deliver the 12-month preventive maintenance kit to NASA GSFC on or prior to the on-site service