ICP-RIE (Fluorine), ICP-RIE (Chlorine), and PECVD cleanroom equipment

Texas State University is seeking bids for the purchase of three separate pieces of cleanroom equipment: ICP-RIE (Fluorine), ICP-RIE (Chlorine), and PECVD systems. The equipment must be manufactured and supported by a single supplier and designed to operate in a particle-controlled environment. The systems must enable the operator to precisely control chamber conditions such as pressure, electrical bias, gas flow, temperature, and sample positioning. The bid package should include the price for all three pieces of equipment, as well as shipping, installation, and training costs. • The ICP-RIE (Fluorine) system must have a 13.56 MHz ICP RF generator with a minimum of 1kW power and associated auto-matching network. • The ICP-RIE (Chlorine) system must have a 13.56 MHz ICP RF generator with a minimum of 1kW power and associated auto-matching network. • The PECVD system must have a 13.56 MHz RF generator with a minimum of 300W power and associated auto-matching network. • The bid package should include a minimum 1-year warranty, 10-year product life cycle support, lifetime process support, and lifetime technical support.