Cleanroom Services

The University of South Carolina is seeking a vendor to provide cleanroom access and specialized micro‑fabrication equipment for research projects. The scope includes use of an electron‑beam lithography system, electron‑beam metallization, atomic‑layer deposition (ALD), plasma‑enhanced reactive ion etching (PE RIE), and plasma‑enhanced chemical vapor deposition (CVD). The university expects full‑service quotations covering equipment usage, technical support, and any necessary consumables. • Provide cleanroom space meeting university standards. • Grant access to specified micro‑fabrication tools (e‑beam, ALD, PE RIE, PECVD). • Include technical assistance, training, and consumable supplies in the quote. • Submit detailed pricing and service description by the deadline.