Solicitation for Gas Abatement System

The National Institute of Standards and Technology (NIST) seeks quotations for a gas abatement system to be installed at its Gaithersburg, MD campus. The system must dry‑scrub fluorine‑containing reaction by‑products (HF) from process gases, treating multiple compounds (HF, Cl₂, CF₄, CHF₃, C₂F₆, SF₆) within a single canister, while handling individual maximum flow rates for each gas. The solicitation includes detailed quotation preparation instructions and requires compliance with the Non‑Manufacturer Rule exemption. Amendments have extended the response deadline to September 15, 2026. • Install a dry scrubber capable of abating HF generated from fluorinated gases. • Treat HF, Cl₂, CF₄, CHF₃, C₂F₆, and SF₆ in a single canister (CF₄, CHF₃, C₂F₆, SF₆ only as HF by‑products). • Accommodate individual maximum flow rates; gases will not be simultaneous at peak flow. • Include ballast N₂ flow (≤ 50 sccm) from vacuum pump. • Submit a complete quotation (Volumes I‑III) by the extended deadline.