CHIPS R&D Electrical/thermal TEM holder – Combined Sources Sought/Notice of Intent to Sole Source

The National Institute of Standards and Technology (NIST) is seeking information from sources that may be capable of providing a specialized TEM holder system and compatible microelectromechanical system (MEMS)-based chips for high-gain EBIC measurement, in-situ electrical biasing, and heating. The system will be used to investigate the early stage of material failure and electrical degradation in next-generation devices. The requirements include a single-tilt TEM sample holder compatible with TFS S-Twin and S-Twin Prime Pole Piece, multiple electrical leads/feedthroughs, low-noise STEM-EBIC measurement capability, and compatibility with various MEMS-based chips. • The TEM holder shall have multiple electrical leads/feedthroughs optimized for low-noise STEM-EBIC measurement, in-situ biasing, and heating. • The TEM holder shall be compatible with various MEMS-based chips optimized for low-noise STEM-EBIC measurement, in-situ biasing, and heating. • The TEM holder shall be equipped with low-noise STEM-EBIC measurement capability in a minimum of two current ranges. • The TEM holder shall include at least 12 STEM EBIC/biasing MEMS chips.