Commercial semi-automatic probe stations

The National Institute of Standards and Technology (NIST) is seeking information from potential vendors for a commercial semi-automatic probe station. The station should be capable of probing wafers up to 300 mm in diameter and have specific technical specifications, including low-noise probe tips, a heated wafer chuck, and a digital microscope. The purpose of the probe station is to study the reliability of silicon carbide field effect transistors. • The probe station must be semi-automatic and capable of probing whole wafers and pre-diced dies. • The station must have four probes with magnetic bases and be compatible with low-noise, blade-style probe tips. • The heated wafer chuck must be capable of reaching temperatures of at least 200 degrees Celsius. • The station must include a digital microscope capable of imaging 5 μm features and have user-friendly software for control of probing and microscope manipulation. • The station must have vibration isolation.