Process Gas Line Installation to Support Bosch-optimized ICP-DRIE Plasma Etch System

The Naval Research Laboratory (NRL) is seeking a vendor to install multiple ultra-high purity (UHP) stainless steel process gas delivery lines from source bottles located in the NRL-DC Building 250 north utility spine to a Bosch-optimized inductively coupled plasma deep reactive ion etching system (ICP-DRIE). The vendor will be responsible for removing and disposing of existing process gas lines, installing new or reusing existing gas lines, and providing all necessary mechanical fittings and valves. The gas lines must meet specific requirements, including being rated ultra-high purity and made of 316L stainless steel. The vendor will also be required to perform helium leak tests to demonstrate a leak rate of 1x10-8 atm-cc/sec or less. Key points to consider: • The vendor must be an Original Equipment Manufacturer (OEM), an OEM authorized dealer, an authorized distributor, or an authorized reseller for the proposed equipment/system. • The vendor must provide documentation from the manufacturer stating that they are an authorized distributor for the specific items being procured. • The vendor must supply all mechanical fittings and valves. • The vendor must perform helium leak tests to demonstrate a leak rate of 1x10-8 atm-cc/sec or less. • The vendor must coordinate with the owner to complete the effort in a continuous time span and work to minimize the interruptions to other workers and tools within the cleanroom.