The United States Navy is seeking a contractor to provide a complex gas delivery system to support the AIXTRON 3x2 CCS MOCVD reactor, a high-precision tool for epitaxial growth used in semiconductor and optoelectronic device fabrication. The system must include gas cabinets, gas panels, ultra-high purity piping, and a gas detection system. The contractor must also provide installation, commissioning, and a one-year warranty. Key features of the system include:
• Gas cabinets for nitrogen, hydrogen, and other gases
• Ultra-high purity piping and gas panels
• Gas detection system with 18 gas detectors
• Abatement system with a clean scrubber and bypass cannister
• Installation and commissioning of the system
The contractor must provide a proposal that includes shipping and a one-year warranty.
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