STS Deep Reactive Ion Etcher Upgrade

The University of Wisconsin‑Madison’s Nanoscale Fabrication Center seeks a vendor to upgrade its STS Deep Reactive Ion Etcher (DRIE) control system. The scope includes providing new PAC hardware and HMI software, installing and commissioning the upgrade, delivering complete as‑built documentation, training staff, and supplying a 12‑month preventive‑maintenance service. The contract is a competitive Request for Bid (RFB) with a net‑30 payment term and requires the bidder to hold appropriate insurance, warranty, and de‑barment certifications. • Upgrade of PAC control hardware and HMI for an existing STS DRIE tool • Installation, on‑site commissioning, and training of university personnel • Delivery of full mechanical/electrical drawings, backup software, and 12‑month PM service • Mandatory JAGGAER supplier profile, warranty, and insurance compliance