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  5. ›Purchase of an Electron Beam Lithography (EBL) System

Louisiana Tech University Office of Purchasing·Louisiana

Purchase of an Electron Beam Lithography (EBL) System

Closes 10/9/2026$600k – $2.2MInvitation for Bid
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Description

Louisiana Tech University’s Office of Purchasing is seeking sealed bids for a single, state‑of‑the‑art Electron Beam Lithography (EBL) system to support the Institute of Micromanufacturing. The vendor must provide a complete, new EBL instrument that meets detailed technical specifications (≥100 nm resolution, ≥3 mm × 3 mm write area, oil‑free vacuum, integrated SEM, 2″ × 2″ sample capacity, full software suite, on‑site installation, training, and all associated customs, duties, and insurance). Pricing must be firm for at least 30 days, include FOB destination, and cover shipping, installation, and end‑user training. The bid deadline is 9 Oct 2026 2:00 PM CT; the award will be based on the lowest compliant price. The contract may include up to two optional 12‑month extensions, not exceeding a total of 36 months. • One unit of an EBL system (full hardware, software, and accessories) • Delivery to 505 Tech Drive, Ruston, LA • Installation, start‑up, verification, and user training • All customs, duties, taxes, and insurance included • Vendor must provide certificates of insurance and comply with Louisiana state procurement rules.

Attached files

Contact

[email protected]

(318) 257-4205

Key dates

Opened
9/18/2026
Closes
10/9/2026

Last updated

Details

Type
Invitation for Bid
Industry
Manufacturing
NAICS
333241
Solicitation №
50012-665-27

Budget estimate

$600,000 – $2,200,000

The document does not disclose a price, but modern electron‑beam lithography systems typically range from $500 k to $2 M depending on configuration, accessories, and service packages. Considering the requirement for full installation, training, and all import duties, a reasonable estimate for the total contract value is between $600,000 and $2,200,000. Factors influencing the final amount include optional accessories, warranty extensions, and any custom software integrations.

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