Service Contract for Tescan Scanning Electron Microscope –Notice of Intent to Sole Source

The National Institute of Standards and Technology (NIST) is seeking a service contract for a Tescan scanning electron microscope (SEM). The contract will provide technical support and maintenance for the existing SEM, which is used for 3-dimensional imaging of integrated circuit devices. The SEM provides 3-dimensional metrology at nanoscale spatial resolutions, and the service contract is necessary to ensure continued successful collection of critical metrological data for the semiconductor industry. The key requirements for the contract include: • Providing Tescan-guaranteed accessories and parts for the SEM • Providing proprietary software required to operate the instrument • Providing factory-trained service engineers for the SEM • Meeting NIST's minimum requirements, which include providing the necessary technical support and maintenance for the SEM.