Optical Microscope

The National Institute of Standards and Technology (NIST) is seeking information from companies that can provide an optical microscope capable of observing 200 mm wafers at a range of magnifications extending to at least 100X. The microscope should have an encoded motorized stage and software to allow stitching together of an array of images to cover large portions of the wafer. The ideal microscope should meet or exceed the specified minimum requirements, including having a weight of less than 65 kg, an ergonomic tilting trinocular head, LED-based illumination, a motorized nosepiece, and objective lenses with various magnifications. • The microscope should be a complete, integrated system with all necessary components, including the main body, head, motorized nosepiece, optics, illumination, motorized stage, digital camera, control electronics, and software. • The system should be capable of real-time viewing, image acquisition and storage, measurements, and annotations. • The microscope should be compatible with various formats and have a dust cover. • Companies should provide information about their experience in designing and manufacturing optical microscopes, as well as any relevant past performance. • Respondents should also identify any aspects of the requirements that could be viewed as unduly restrictive and suggest alternatives to encourage the participation of small businesses.