Vector Network Analyzer

The National Institute of Standards and Technology (NIST) is seeking information from vendors about their capabilities to provide a Vector Network Analyzer (VNA) for a project related to RF waveform and rapid frequency-comb diagnostics for plasma etching. The VNA should operate between 200 kHz and 8 GHz, have direct receiver access, and be able to measure harmonics and intermodulation products. The project aims to establish traceability for high-power RF signals and support the semiconductor industry by disseminating precision RF measurement techniques. • The VNA will be used to characterize the measurement system, including waveguides, couplers, connectors, and other components. • The VNA should have 4 measurement ports and be able to coherently and simultaneously acquire signals from the forward and backward wave receivers on all ports. • The VNA should have a high dynamic range and low noise floor. • The project involves signals with both milliwatt and kilowatt power levels at the device under test (DUT) reference plane.