Intent to Sole Source Keyence Confocal/Metrology System

The Montana Microfabrication Facility at Montana State University Bozeman requires a non-contact, high-resolution optical metrology system to support inspection and characterization of microfabricated and photonic devices. The system must be capable of measuring chip bow, etch depth, surface roughness, and film thickness, with specific requirements for z resolution, xy resolution, and lens objective. The system must also have a motorized stage capable of automatically measuring features across a 100 mm wafer. • The required metrology system must be commercially available with US-based service and technical support. • The system must be able to measure surfaces with widely varying reflectivity and roughness. • The system must be able to take full focus images of complex structures for analysis, publication, and marketing purposes. • The total contract value is estimated at $185,000.00.