Sources Sought Notice for CHIPS R&D Thermogravimetric Analyzer with Gas Chromatography (GC) – Mass Spectrometry (MS)

The National Institute of Standards and Technology (NIST) is conducting market research to identify potential sources of commercial products/services that can provide a Thermogravimetric Analyzer with Gas Chromatography (GC) – Mass Spectrometry (MS) for CHIPS R&D. The system should include TG-DTA coupled with GC-MS, with specific requirements for the TG-DTA and GC-MS components. The system will be used to advance new materials, packaging technologies, and production methods essential to semiconductor manufacturing. Key features and requirements of the system include: • Simultaneous thermal gravimetric measurement, calorimetry, temperature measurements, and quantification of evaporated vapors • TG-DTA with two compartments based on measurement capabilities, test conditions, and precision • GC-MS coupled with both compartments of TG-DTA • Specific temperature ranges and control requirements for the TG-DTA and GC-MS components • Turbo molecular vacuum pump system for evacuation of the sample chambers • Fully computerized system with software to control the systems and acquire and analyze data