Micro X-ray Computed Tomography System

The National Institute of Standards and Technology (NIST) is seeking information from potential sources of commercial products/services that can provide a micro X-ray Computed Tomography (µXCT) system to support advanced semiconductor research. The system should be able to image specimens with a major dimension on the millimeter scale with nanometer resolution. The µXCT system should include a microscope that collects multiple X-ray images of a specimen and uses integrated reconstruction software to produce a three-dimensional image of the specimen. Some key features and requirements of the system include: • A maximum spatial resolution of 500 nm or smaller • A minimum achievable voxel size of 50 nm or smaller • A sealed tube X-ray source with a variable voltage up to 160 kV • A specimen stage that allows for 360° rotation of a specimen • An optics-based or geometry-based magnification scheme • A visible light camera inside the radiation enclosure to visualize stage movements with the enclosure door closed • At least one X-ray detector with greater than 20 megapixels • Software that provides full control over the instrument, including adjustment of all stages, filters, and detectors • A radiation-safe enclosure with interlocks to prevent radiation exposure • Remote operation capabilities • Support equipment such as pumps, chillers, and computers • A current installation guide