Versa 730 X-ray Computed Tomography Microscope

The National Institute of Standards and Technology (NIST) intends to negotiate a firm-fixed price purchase order on a sole source basis with Carl Zeiss Microscopy, LLC for a Versa XRM 730 X-ray Computed Tomography Microscope. The microscope will be used for micro-scale three-dimensional imaging of semiconductor materials and devices. The system must have a high-energy X-ray beam, detect transmitted X-rays, and reconstruct collected images into a three-dimensional representation of the specimen. The contractor must provide a comprehensive warranty, training, and support for the instrument. • The system must have an ultimate spatial resolution of 450 nm or smaller. • The system must be able to perform continuous data collection actions that last up to 36 hours. • The system must include a sealed tube X-ray source, a specimen stage, optics, detectors, and software for data collection and reconstruction. • The contractor must provide at least three days of on-site training and three days of virtual applications support for up to five NIST staff members. • The contractor must provide a comprehensive warranty to cover the instrument for a period of one year.