PLASMA PRO 100

The Department of the Air Force is seeking responsible and eligible vendors to provide a PlasmaPro 100 Reactive Ion Etch (RIE) system, along with all required support equipment. The system will be installed at the Air Force Institute of Technology (AFIT) at Wright-Patterson AFB, OH. The period of performance is 120 days after contract award. The required components include the PlasmaPro 100 ICP Etch system, Cobra300 3kW ICP plasma etch source, cryo-cooled/electrically-heated etch lower electrode kit, complete gas delivery system, and associated vacuum pumps, chillers, and control hardware. • The system must be installed, set up, tested, and trained for use. • The contractor must provide all personnel, equipment, tools, parts, and supervision necessary for the installation and training. • The contractor must comply with the requirements outlined in the Statement of Work. • The acquisition strategy for this requirement has not been decided, but the Air Force is contemplating a small business set-aside if there is sufficient demonstrated interest and capability.