Sputter coater for scanning electron microscopy

The National Institute of Standards and Technology (NIST) is seeking information from potential sources for a sputter coater for scanning electron microscopy. The system should be capable of depositing various metals and carbon, have a user-changeable metal sputtering target and/or carbon evaporation source, and be able to sputter over specimens up to 50 mm/2 inches in diameter. The system should also have a chamber that opens for easy loading and unloading of specimens, and have spaces for multiple pin-stub style holders. The system should be able to accommodate at least one process gas for sputtering, and include or be compatible with a turbo pump and/or turbo pumping station. • The system should be able to deposit various metals from targets as well as carbon from “pencil” type or “braid” type carbon sources. • The metal sputtering targets and/or carbon evaporation source should be user changeable. • The system should be able to sputter over specimens up to 50 mm/2 inches in diameter. • The chamber should open such that loading and unloading specimens is simple for users. • The chamber/stage should have spaces for multiple pin-stub style holders. • The system should be able to accommodate at least one process gas for sputtering. • The system should include or be compatible with a turbo pump and/or turbo pumping station.