SUSS ACS200 Control System Upgrade

The National Institute of Standards and Technology (NIST) is seeking information from sources that can provide a solution to upgrade the control system of their SUSS ACS200 Microlithography cluster. The system is used for precision nanoscale lithographic imaging and is essential for the NIST's NanoFab mission. The ideal solution should include a new tool controller panel and PC with a proper operating system, and the ability to perform programmable sequences and recipes for individual and sequential processes. The vendor should also provide maintenance and operations training for the new system, as well as updated tool manuals and schematics. Some key requirements for the solution include: • The ability to handle substrates with specified wafer diameters and thickness ranges • The ability to perform existing baseline sequences and recipes in automatic mode • The ability to execute existing manual functions in all modules under service mode • The provision of all parts and labor necessary to supply and install the upgrades • The provision of maintenance and operations training for the new system • The transfer of old data files from the old computer to the new computer The NIST is looking for sources that can provide a comprehensive solution that meets or exceeds their minimum requirements.