Notice of Intent to Sole Source with Telops USA, Inc for Rapid Acquisition Mid-Infrared Camera System

The National Institute of Standards and Technology intends to procure a rapid acquisition mid-infrared camera system on a sole source basis with Telops USA, Inc. The system will be used for the CHIPS Metrology Program, specifically for research in Grand Challenge 5, Modeling/Simulating Semiconductor Manufacturing Processes. The scope of work includes delivering one Rapid Acquisition Mid-Infrared Camera System, inclusive of FAST M3K (IR-FAST_IR-3K) Calibration for Spectrometer (IRC-CUST4), Image Acquisition Card (IRC-FG1), Cameralink Cable (IRC-CL-5m-Full), and SDK Kit for MD (IRC-SDK). The technical requirements include a full frame rate greater than or equal to 3000 Hz, minimum 16 GB of internal memory, and sensor pixel pitch of less than or equal to 35 microns. • The system will be used for metrology tools to better correlate reactor inputs with etching outcomes and to precisely evaluate consistency across plasma etching tools. • The system will enable the application of novel optical diagnostics like broadband laser spectroscopy to the study of chemical transformations in key plasma etching processes. • The contractor shall deliver the system with a one-year warranty, FOB Destination delivery terms (or equivalent INCOTERM such as DDP).